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Long-stroke nanopositioning stage driven by piezoelectric motor
  • ISSN号：1687-725X
  • 期刊名称：Journal of Sensors
  • 时间：2014
  • 页码：1-9
  • 相关项目：压电陶瓷高动态精密定位驱动机理与控制方法研究
作者： Sun, Fujun|Zhu, Junhui|Pang, Ming|Ru, Changhai|
同期刊论文项目
压电陶瓷高动态精密定位驱动机理与控制方法研究
期刊论文 26 会议论文 2 著作 1
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