中文摘要：

介绍了一种基于超声喷涂的电路印刷方法，适用于各种柔性材质的基体，可以更高效、更环保地完成柔性印刷电路（FPC）的制造。其主要思想是：纳米银导电油墨通过超声喷头雾化，进而喷涂在覆盖有金属掩膜版的聚酰亚胺（PI）膜基体上，低温烧结（125℃×20min）之后就得到柔性电路。测试结果表明，图案化的导电线路（宽度为500μm）经过多次弯曲后仍能保持良好的导电性，其表面方阻随喷涂层数的增多而稳定地减小，8层涂覆所得线路的方阻为（21±2）mΩ／sq。扫描电镜观察表明，导电线路平整光滑，毛边误差在50pm以内。

英文摘要：

A ultrasonic spray coating method suitable for printing circuits on different kind of flexible substrates was introduced The fabrication of flexible printed circuit （FPC） via this method is highly efficient and more environmentally friendly. The main principle is that the nano-silver conductive ink is atomized by the ultrasonic nozzle and then sprayed on the polyimide （PI） film which is covered with a metal mask. After patterning on PI film, the ink is sintered at 125 ℃ for 20 min and the flexible circuit is achieved. The test results showed that the patterned circuit with a width of 500 μm maintains good conductivity after repeatedly bending for several times. The surface sheet resistance of the inkjet-printed silver layer on PI film is steadily decreased with the increasing of the number of silver layers deposited. In the case of eight prints, the sheet resistance is 21±2 mΩ/sq. The observation by scanning electron microscope showed that the morphology of the circuit is level and smooth, and the average error of burr is within 50 μm.