中文摘要：

提出并研究了水环境下激光超声复合加工方法，利用该方法对氮化硅陶瓷进行刻蚀加工，加工时对试样施以高频振动。通过实验对比分析激光能量、脉冲宽度、重复频率和超声振动功率等工艺参数对si3N4在超声振动辅助与无振动辅助情况下激光亥4蚀后的深度及表面质量的影响。研究结果表明，在一定工艺参数范围内，超声振动的加入可明显增加激光超声复合刻蚀的深度，提高光洁度及表面质量。

英文摘要：

A new method of laser-ultrasonic combined machining under water and is applied to etch Si3 N4 ceramics in this pa- per. The samples vibrate at a high frequency while being machined. A comparative study on the influence of process parameters used in laser machining with or without vibration on etching depth and surface quality of Si3 N4 ceramics is presented. The re- suits show that the introduction of ultrasonic vibration can increase the etching depth significantly and thus improve the surface quality within a certain range of parameters.