中文摘要：

利用低压水射流辅助激光加工的方法对多晶硅进行试验加工,测量了无水情况下以及不同射流速率下的盲孔体积,对比研究了不同射流速率下能量损失率的变化规律,并分析了变化的原因。研究表明,射流速率对激光烧蚀的能量损失率有一定影响;当速率增加到一定程度时,射流的冲蚀作用去除了熔渣以及重铸层,从而使激光与材料充分接触,提高了激光能量的有效利用,增加了盲孔烧蚀量。

英文摘要：

Used the way of low-jet assisted laser processing to process polycrystalline silicon, measured volumes of blind holes under no-water and different jet velocities, compared the rate of energy loss under different jet velocities, and analyzed the reasons for the changes. Tests show that jet velocity had a certain influence on energy loss rate; when the velocity increased to a certain extent, the jet eroded the recast layer of slag, so that the laser had a sufficient contact with materials, which improved the efficient use of laser energy and increased the ablation amount of the blind hole.