中文摘要：

以Al_2O_3陶瓷为研究对象,开展了低压水射流激光复合多道切割的试验研究。通过试验,对比分析了水射流激光复合单道切割技术与水射流激光复合多道切割技术的优劣;通过改变首刀激光参数,研究不同首刀切割深度对Al_2O_3陶瓷基板的切割质量影响。试验结果表明,相较而言,低压水射流激光复合多道切割技术可以明显提高切割质量;在合理的首刀切割深度下,切缝内熔渣残留较少,切槽形貌规则,锥度基本保持在0.12以下。

英文摘要：

Al_2O_3 ceramic as the research object,carried out the experimental study of multi-pass laser cutting technology assisted with low-pressure water jet.Through the experiment,the advantages and disadvantages of the muti-pass laser cutting technology assisted with water jet and the single-pass laser cutting technology assisted with water jet are analyzed and compared.By changing the laser parameters,the influence of different first cutting depth on the cutting quality of Al_2O_3 ceramic substrate was studied.The experimental results show that,the technology of muti-pass laser cutting assisted with water jet can improve the cutting quality;if the first cutting depth was at a reasonable Numerical range,this technology can obtain less residual slag,morphology rules and taper remained under 0.12.