中文摘要：

氢气广泛地应用于航天和其他工业中，但其极易泄露、易燃、易爆，因此，对于氢传感器的研究显得十分迫切。综述了复合稀土氟化物氧传感器、半导体氧化物氧传感器、表面等离子钯膜氢传感器的国内外研究进展情况，着重对半导体氧化物氢传感器的原理、结构、性能以及取得的研究成果进行了介绍，并提出了氢传感器的发展方向和前景。

英文摘要：

The hydrogen gas is used widely in spaceflight and industry, but it is easily leaked, burned and exploded, the research of hydrogen sensitive sensor is very exigent. The research status of complex thulium fluoride hydrogen sensitive sensor,semiconductoroxide hydrogen sensor and palladiumof surface plasmhydrogen sensor are summarized. The research achievement of semiconductor oxide hydrogen sensor in theory, structure and properties are introduced. The development prospect of hydrogen sensor is provided.