中文摘要：

通过Raman、XRD、SEM分析方法分别对大面积高质量金刚石自支撑膜的质量、晶体结构、晶粒尺寸进行研究，分析它们对金刚石自支撑膜热导率的影响。研究结果表明，金刚石自支撑膜的质量对热导率的影响较大，质量越好，热导率越接近于天然金刚石的热导率；并且金刚石自支撑膜中晶体[220]取向度越高，热导率越高。形核面晶粒尺寸越大，晶粒间的晶界就减少，有利于提高金刚石自支撑膜的热导率。

英文摘要：

In this paper, the quality, crystalline structure and grain size of large area high quality free standing diamond films were studied by Raman spectrometer, X-ray diffraction （XRD） and scanning electron microscopy （SEM）. The results show the thermal conductivity increases with the qualities of free standing diamond films. When the quality is higher, the thermal conductivity increases slowly much more. The [220] orientation is more, the thermal conductivity of free standing diamond film is higher. Increasing with the increment of grain size at nucleation side, the thermal conductivity is increased.