中文摘要：

为了提高金刚石膜的红外透过率和高温抗氧化性能，采用纯钇（Y）金属靶，使用直流反应磁控溅射法在光学级金刚石自支撑膜表面制备了Y2O3薄膜。对比研究了光学级金刚石自支撑膜和Y2O3／Diamond／Y2O3复合窗口的高温抗氧化性能，及氧化前后样品表面形貌和红外透过率的变化情况。热分析、扫描电子显微镜和傅立叶变换红外光谱仪的研究结果表明Y2O3薄膜对光学级金刚石膜有非常好的抗氧化防护性能，在高达950℃的温度暴露30s后对光学级金刚石膜表面没有造成明显损伤，且仍能保持良好的增透效果（透过率超过80％）。

英文摘要：

Yttrium oxide （Y2O3） thin films with smooth surfaces were prepared on optical grade chemical vapor deposition（CVD） lree-standing diamond film to improve the infrared optical properties and oxidation resistant properties of the diamond film by direct current reactive magnetron sputtering of high purity Y target. The oxidation of the diamond film was studied by TG-DSC analysis. The effect of oxidation on surface morphology and IR transmission spectrum of the diamond film and Y2O3/Diamond/Y2O3 was investigated by SEM and FTIR. It was demonstrated that the diamond film with Y2O3 thin film coatings can be protected from oxidation up to 950℃ for 30s, whilst the effect of transmission enhancement was still maintained （ 〉 80% ）.