中文摘要：

纳米压印技术十几年来获得快速发展,新提出的纳米压印压缩式气压纳米压印系统存在的自身振动影响图像转移精度。采用阻尼减振系统避免施压过程中伺服马达和施压活塞位移产生的系统振动影响。基于振源和施压系统结构建立阻尼减振模型,材料物质特性分析和有限元模型仿真分析优化减振系统材料及其内部结构设计。分析结果表明蜂窝外接圆半径为0.02 m,相邻两外接圆距离外切的蜂窝结构为减振装置最优单元层,橡胶材质的3层单元层蜂窝型层叠减振结构最大衰减振幅可达87.51%,可有效减少系统振源对压印转移图形保真度的影响。

英文摘要：

Nanoimprint lithography （NIL） has been developed fast in decades. Vibration caused by novel Compressional Gas Cushion Press （CGCP） style of NIL deteriorates the pattern transfer precision of CGCP. Damping vibration system is used to reduce the influence of vibration caused by servomotor and piston＇s movement. Damping vibration model is established based on vibration source and CGCP-NIL structure. Analysis of material properties and finite element modeling simulation optimizes materials performance and the inner structure of damping vibration system. The simulation results indicate that circumcircle radius of honeycomb in the optimal unit layer is 0.02 m and the circumcircles of two adjacent honeycombs are external tangent. The honeycomb damping vibration cushion with three optimal unit layers which are made up of rubber can attenuate 87.51% of the maximum amplitude. Damping vibration system can lower the vibration source impact on fidelity.