中文摘要：

微型电磁振动能量采集器（振动能量发生器）是振动能量采集器的一个重要分支,其利用电磁感应原理吸收环境的振动能量。综述了近几年微型电磁振动能量采集器的相关研究、制作工艺和检测技术,按运动件的支撑方式对其加以分类。对各研究中电磁振动能量采集器的特性参数进行考察,探讨了现有研究的优点与不足,分析了微型电磁振动能采集器的发展趋势,提出了新型抗磁悬浮振动能量采集器的原型。对抗磁悬浮振动能量采集器进行了原理性阐述,其工作是可行的,进一步讨论了这种振动能量采集器的微加工制作工艺可行性及其优点。

英文摘要：

The micro-electromagnetic vibration-based energy harvester（vibration-based generator） is an important branch of the vibration-based energy harvester,which harvests the energy from the environment based on the electromagnetic induction principle.The theoretic research,fabrication processes and testing techniques of the micro-electromagnetic vibration-based energy harvester in recent years are reviewed,which is classified according to the supporting manner for the moving parts.The characteristic parameters of the electromagnetic vibration-based energy harvesters in the researches are studied,the advantages and disadvantages of the current research are discussed,and the development trend of the micro-electromagnetic vibration-based energy harvester is analyzed.Then,a novel prototype of the vibration energy harvester based on the diamagnetic levitation is put forward.The principle of the energy harvester based on the diamagnetic levitation is discussed to testify its feasibility.Besides that,the micro-fabrication process,feasibility and advantages of the energy harvester are further analyzed.