介绍了一种将超声检测技术与扫描探针显微技术相结合的扫描近场声显微镜(SNAM),并利用该装置对CD—R光盘表面薄膜进行了检测,得到了其平整印刷面的SNAM图像,与原子力显微镜(AFM)测得的凹槽数据面形貌吻合。文中介绍了这种SNAM的结构、基本工作原理和检测方法,并给出了具体的实验结果。
Introduced a kind of home made scanning near field acoustic microscope (SNAM)combined ultrasonic detection technology and scanning probe microscopy. The piezoelectric transducer in the SNAM is used as ultrasonic signal generator, and the cantilever worked in contact mode. The SNAM image from the top surface of CD-R film agrees with the atomic force microscope (AFM) from the back surface. The working principle and detection method was also given in this paper.