中文摘要：

选用SnCl4·5H2O和SbCl3为基本原料，采用共沉淀法制得了掺锑氧化锡（ATO）沉淀，经胶溶制得ATO纳米水溶胶，将其溶于纯水并作为亚相，采用LB膜技术制备了10mm×30mmATO复合膜，烧结处理后制得ATO超薄膜，采用紫外光谱、X-射线衍射、原子力显微镜等手段对热处理前后的薄膜进行了形貌、组成、结构表征。结果表明，制得的是均匀性和覆盖度较高的ATO超薄膜。

英文摘要：

Antimony doped tin oxide （ATO） was prepared by co-precipitation method from SnCl4.SH2O and SbCl3. ATO nanoparticles hydrosol was synthesized by colloidal chemical method, and complex films （ 12 mm × 20 mm） were prepared by LB technology after the hydrosol was dissolved in water. The ATO thin films were prepared after sintering and characterized by UV-Visible spectroscopy, X-ray diffraction and AFM. It is shown that pure ATO thin films could be formed.