中文摘要：

为了阐释空气静压导轨气膜间隙处在微小尺度所体现的特性,引入气体稀薄效应中的速度滑移算法到Navier-Stokes方程,推导出体现微尺度条件下空气膜流动特点的雷诺方程,进而对气膜内的压强分布进行了仿真分析,根据得到的压强分布计算气膜承载力和刚度随气膜厚度变化的规律,通过试验对得出的结论进行了间接验证,与分析结果吻合.

英文摘要：

The velocity slip calculation method which reflects the rarefied effect was introduced to the Naiver-stokes equation for interpreting the characteristics of aerostatic guideway gas film clearance in micro-scale. The Reynolds equation indicating the flow characteristics of gas film was derived. The pressure distribution of the gas film was simulated. The variation rules of the stiffness of the gas film were calculated with the pressure distribution. This was verified by experiments indirectly and agreeds with the analysis results.