中文摘要：

In order to analyze the performance of aerostatic guidways,the stiffness calculation equation of the aerostatic guideway with two-row orifice has been derived by gas lubrication theory. For the complex structure of the motion guideway and unloading guideway,the frequency of the whole slides in machining direction with gas thickness has been derived. Wavelet transform as a means to process the measured signal of workpiece surface, the frequency characteristics of gas fluctuation of aerostatic guideways has been extracted out from the measured signal,and the errors of the guideway system have been identified according to the power spectral density (PSD) ,and this provide a basis for the identification of machine tool error.

英文摘要：

In order to analyze the performance of aerostatic guidways, the stiffness calculation equation of the aerostatic guideway with two-row orifice has been derived by gas lubrication theory. For the complex structure of the motion guideway and unloading guideway, the frequency of the whole slides in machining direction with gas thickness has been derived. Wavelet transform as a means to process the measured signal of workpiece surface, the frequency characteristics of gas fluctuation of aerostatic guideways has been extracted out from the measured signal, and the errors of the guideway system have been identified according to the power spectral density （PSD）, and this provide a basis for the identification of machine tool error.