中文摘要：

提出一种基于有限Radon变换（FRAT）的MEMS结构特征方向提取方法．首先，将MEMS表面数据转换为二维数据矩阵，并将矩阵延展成素数大小的方阵；然后，对延展后的数据沿着特定的方向进行投影变换和点积分运算，得到结果矩阵；最后，将结果矩阵用灰度图显示，根据图像中的0灰度值的像素点所在的行列得到原始表面中的主要方向．通过对MEMS器件沟槽结构的模拟分析以及对MEMS器件沟槽和柱状阵列结构的实验分析，验证了该方法的有效性．实验结果表明该方法方向提取误差小于1％．

英文摘要：

A method to extract the micro-structure directions of MEMS by finite Radon transform （FRAT） was proposed to evaluate geometric parameters of MEMS structures. Firstly, the MEMS surface data was transformed into a two-dimensional matrix, which could be extended to square matrix whose size was a prime number that was greater than that of original matrix. Secondly, the projection transformation and integral operation on special directions were conducted on the extended matrix to obtain the result matrix. Finally, the result matrix was displayed in a gray level image and the main directions in the original surface were extracted by analyzing the line positions of pixels with zero gray value. Experimental results show that the error of this method is less than 1 ~//0.