中文摘要：

采用Nd∶YAG激光器对预硬高硬度镜面塑胶模具钢HPM75进行了微流道沟槽的铣削试验。通过铣削熔屑的排除量和排屑过程分析,研究了激光工艺参数及激光扫描方向对铣削沟槽质量的影响。结果表明,激光能量,辅助气压,激光扫描方向与排屑方向间的夹角α是影响铣削质量及铣削效率的重要因素。进一步分析了激光铣削圆弧形沟槽时,所遇到的加工方式与路径规划问题,通过路径规划,增大熔屑的排除量,提高铣削加工效率及质量。采用优化参数铣削出宽0.29mm、深0.28mm的微流道沟槽,侧壁表面平整,达到抛光前的要求。ZYGO表面轮廓仪对该沟槽的检测结果表明：不同位置处沟槽的宽度和深度保持很好的一致性。

英文摘要：

An experiment of laser milling of micro groove on die steel HPM75 was carried out. The influences of laser milling parameters and scanning direction on the milling quality were investigated by analyzing the material removal and the variation of melted chip. The results indicate that the laser power, the auxiliary gas pressure and the angle between scanning direction and melted chip removing affect the efficiency and quality of the laser milling greatly. The scanning path was also planned for a circle route, in which the amount of chip removal increased, the milling efficiency and quality increased also. With the optimized parameters, a groove of 0.29 mm in width, 0.28 mm in depth was milled, which reached the technique requirements before polishing. The results inspected by ZYGO profile - meter show that the groove has a good consistency in both width and depth anywhere.