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中文摘要：
设计并制作了一种＂四悬臂梁-中心质量块＂结构的振动能量拾取微机电系统（MEMS）压电式微能源,实现了环境振动能量向电能的转换。首先利用溶胶-凝胶工艺完成锆钛酸铅（PbZrxTi1-xO3,PZT）压电薄膜的异质集成制备;然后通过MEMS工艺和引线键合技术进行器件基础结构的集成制造;最后借助振动测试系统对该器件的各项输出性能进行测试。测试结果表明,8Hz谐振频率工作状态下,该压电式微能源器件的输出电压峰-峰值随着加速度激励的增加呈线性增大,当加速度激励为10 m/s^2时,该能量采集器件的输出电压峰-峰值为82.4mV。在器件两端加载2.0 MΩ的负载时,器件输出功率密度达最大值（为2.074 3μW/cm3）。
英文摘要：
A piezoelectric vibrational power harvesting MEMS micro power with four cantilever beam-center quality block structure for low frequency applications which converts environment vibration energy into electric energy is designed and manufactured.The heterogeneous integration manufacturing of the PZT piezoelectric thin film is accomplished by the Sol-Gel process.The foundation structure of the MEMS micro power is fabricated by using micromachining technology and wire bonding technology.The output performance is evaluated by using vibration testing system.The tested results show that output peak-peak voltage of the device increases linearly with the increase of acceleration at the resonant frequency of 8Hz,and the output peak-peak voltage is up to 82.4mV at the acceleration excitation of 10m/s^2.The maximum output power density is up to 2.074 3μW/cm3 when the optimized resistance load is 2.0 MΩ.
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