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中文摘要：
信息技术的发展要求存储器件必须具备超高存储密度、超快的存取速率。存储介质是高密度信息存储研究中的基本问题，目前几乎所有的超高密度存储技术都是在薄膜介质上实现的。薄膜的性质除依赖于存储介质材料外还依赖于薄膜的制备技术。从存储介质薄膜的制备角度介绍了超高密度信息存储的研究进展。
英文摘要：
The development of information technology requires that the properties of data storage devices should be ultrahigh in density and access rate. Most of the ultrahigh density information technologies are realized on the film media. The properties of the films depend not only on the materials of the storage media but also on the fabrication methods of the films. The research progress in this field is reviewed from the viewpoint of fabrication of storage media films.
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