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中文摘要：
基于多次压电效应理论提出一种有别于传统压电执行器驱动方式的微执行器，且可实现弹性位移与多次逆压电位移的两级定位功能。详细地分析了基于多次压电效应的微执行器的原理，并采用PZT-5压电陶瓷叠堆进行实验，通过改变压电叠堆的边界条件得到了基于多次压电效应的微执行器的位移量，实验结果表明该微执行器产生的弹性位移、多次逆压电位移及总位移均与所施加外力具有较好的线性关系。实验结果不仅验证了理论分析的正确性，而且证明了基于多次压电效应的微执行器的可行性，同时，通过实验间接地量化出PZT-5的二次逆压电系数约为9．46×10^-22 m2／N。多次压电效应研究为压电执行器的设计提供了一条新途径。
英文摘要：
Based on the theory of multiple piezoelectric effects, a kind of microaetuator with a driving mode different from the one of traditional piezoelectric actuator is proposed. And the microactuator can realize two - stage localization of elastic displacement and displacement caused by multiple converse piezoelectric effects. The principle of the microactuator based on multiple piezoelectric effects is analyzed in details. Experimental research of the microactuator was performed using PZT-5 stack. The displacement generated by the microactuator is obtained through changing the boundary conditions of PZT-5 stack. Experimental results show that the elastic displacement, displacement caused by multiple converse piezoelectric effects and total displacement of the microactuator are all linear with the applied force. The experimental results not only verify the correctness of the theoretical analysis but also prove the feasibility of the microactuator based on multiple piezoelectric effects. Meanwhile, the secondary converse piezoelectric coefficient of PZT-5 is quantified to be 9.46 ×10 ^-12m2/N through the experiment indirectly. The study of multiple piezoelectric effects provides a new way for the design of piezoelectric actuators.
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