中文摘要：

设计制造了基于微型加热器平台（MHP）的甲烷气体传感器.微加热器平台因其功耗低、体积小等特点可广泛应用于半导体气体传感器中.微加热器平台的制作是基于IC兼容的MEMS工艺完成的,利用模板法在MHP上原位制备二氧化锡（SnO_2）有序多孔薄膜得到微纳融合气体传感器.利用这种方法制造的传感器功耗仅39 m W,响应时间2 s,对714 mg/m3甲烷的响应可达到1.19,对甲烷的探测下限可达18 mg/m3.此高性能、低成本的传感器有望在生产生活、安全监控等方面得到广泛应用.

英文摘要：

High performance methane gas sensor based on micro-hotplafform （MHP） was designed and fabri- cated. MHP is widely used in semiconductor gas sensor because of its low power consumption, small volume characteristics. The MHP is fabricated based on IC compatible MEMS technology. Miero-nano gas senor was prepared through in-situ fabrication of tin dioxide using template method. The power consumption of the sensor is only 39 mW, and the response time is 2 s, and the sensitivity to 714 mg/m3 methane is as high as 1.19. Because of high signal noise ratio, the detection limit is estimated to be 18 mg/m3 through liner fit. The high performance and low cost sensor is expected to be widely used in industry and safety monitoring.