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中文摘要：
本文对不同初始温度下氩等离子体中主要粒子随时间的演化规律进行数值模拟,跟踪各主要成分粒子的浓度随时间的变化,得到放电后氩等离子体中主要带电粒子和中性粒子浓度随时间的变化规律。计算结果表明,氩等离子体化学反应达到平衡所需时间随初始温度升高逐渐减少,活性粒子Ar＋浓度随时间不断增大,Ar＊、Ar＊＊浓度随时间先增大后减小,最终趋于稳定值达到平衡状态。
英文摘要：
This work carried on a numerical simulation of evolution laws of the main particles in Ar plasma with time-variation under different initial temperatures.The changes of concentration of various main particles with time-variation were tracked,and the evolution laws of concentration of main charged and neutral particles in discharged Ar plasma were obtained.The results show that the time required for Ar plasma chemical reaction to reach equilibrium is reduced with the increasing of initial temperature.The concentration of active particle Ar＋ increases with time,the concentration of Ar＊,Ar＊＊ firstly increases and then decreases with time,and finally reaches equilibrium.
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