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Young’s modulus evaluation by SAWs for porous silica low-k film with cesium doping
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  • 相关项目：表面波无损表征ULSI铜与低介电常数介质布线薄膜机械特性与粘附性的研究
同期刊论文项目
表面波无损表征ULSI铜与低介电常数介质布线薄膜机械特性与粘附性的研究
期刊论文 11 会议论文 5
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