位置：成果数据库 > 期刊 > 期刊详情页
Applying surface acoustic waves technique for film adhesiveness determination
  • 时间：0
  • 相关项目：表面波无损表征ULSI铜与低介电常数介质布线薄膜机械特性与粘附性的研究
同期刊论文项目
表面波无损表征ULSI铜与低介电常数介质布线薄膜机械特性与粘附性的研究
期刊论文 11 会议论文 5
同项目期刊论文
Determination of Young’s modulus and poisson’s ratio of nanoporous low-k thin film by laser-generate
Finite Element Model of SAW Method for Mechanical Characterization of Patterned Thin Films of the UL
声表面波标签中金属栅阵的耦合模理论
Evaluating of adhesion property of ULSI interconnect films by the surface acoustic waves
Young’s modulus characterization of low-k films of nanoporous Black DiamondTM by surface acoustic wa
LSAWs技术检测超薄low-k材料机械特性的匹配算法
Young’s modulus detection for ultra-thin film by LSAWs technique with wavelet and FIR filter de-nois
Young’s modulus evaluation by SAWs for porous silica low-k film with cesium doping
基于电荷分布的分裂指叉指换能器模型研究
Young＇s modulus characterization of low-k films of nanoporous Black Diamond~（TM） by surface acoustic waves