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Correction of remounting errors by masking reference points in small footprint polishing process
  • ISSN号：1559-128X
  • 期刊名称：Applied Optics
  • 时间：2013
  • 页码：7851-7858
  • 相关项目：先进光学制造与检测
作者： Wang, Tan|Cheng, Haobo|Chen, Yong|Feng, Yunpeng|
同期刊论文项目
先进光学制造与检测
期刊论文 32 获奖 2 著作 5
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