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Modified subaperture tool influence functions of a flat-pitch polisher with reverse-calculated mater
  • ISSN号：1559-128X
  • 期刊名称：Applied Optics
  • 时间：2014
  • 页码：2455-2464
  • 相关项目：先进光学制造与检测
作者： Dong, Zhichao|Cheng, Haobo|Tam, H.Y.|
同期刊论文项目
先进光学制造与检测
期刊论文 32 获奖 2 著作 5
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