中文摘要：

三维(3D ) 侧面测量是为帮助制造的一个不可缺少的过程各种各样眼，特别不圆表面。这个工作介绍一个 3D 侧面测量系统的测量错误刻度，也就是 PMI700。测量工具半径，排列错误和温度变化导致的测量错误通过几何学分析和模拟被分析。为半径和排列错误赔偿基于最少的方形的方法建模的工具的赔偿的一个量的方法被建议减少测量错误。为了验证 PMI700，一架飞机和一面不一致的双曲面的镜子的可行性，被 PMI700 和干涉仪分别地测量。二个系统提供的数据是高重合的。从二个系统的结果的直接减法显示为两个片断的 RMS 偏差是不到 0.2。

英文摘要：

Three-dimensional （3D） profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.22.