中文摘要：

介绍了飞秒激光双光子吸收和光聚合的机制，将飞秒激光技术应用于生物相容性材料（ORMOCER）的三维微纳米加工中。在ORMOCER材料内实现了双光子光聚合，最高加工精度达到0．5kcm，突破了衍射极限。推导出双光子光聚合阈值的数学表达式，研究了扫描速度V和激光功率P对横向尺寸的影响规律。在此基础上采用飞秒激光双光子微细加工技术制备了典型的微生物器件——微井阵列、微柱阵列和光子晶体生物微型支架。

英文摘要：

This paper reports the mechanism of two photon absorption photopolymerization and the femtosecond laser technology used for bioeompatible materials ORMOCER three-dimensional micro nano processing. Two-photon absorption photopolymerization was achieved in ORMOCER resin, the resolution reached 0. 5 um less than the diffraction limitation. The mathematical expression of two photon photopolymerization threshold is derived, the effect of the scanning speed V and the laser power P on the transverse size is studied. Using two-photon femtosecond laser micro processing technology fabricates a typical microbial devices such as micro-well array, micro-pole-array, and photonic crystal micro-biological scaffold.