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Design and Fabrication on the Electroplating Polishing Pad with Phyllotactic Pattern
  • 期刊名称：Advanced Materials Research
  • 时间：0
  • 页码：289-293
  • 语言：英文
  • 相关项目：基于一种仿生表面Smart垫的化学机械抛光机理研究
作者： YuShan Lu, ZhiHui Kou,Jun Wang , ChengYi Zhao|
同期刊论文项目
基于一种仿生表面Smart垫的化学机械抛光机理研究
期刊论文 13 专利 4
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