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硅片抛光的接触压强分布与宏观形貌创成机理
  • 期刊名称：东北大学学报(自然科学版)
  • 时间：0
  • 页码：1173-1177
  • 语言：中文
  • 相关项目：基于一种仿生表面Smart垫的化学机械抛光机理研究
作者： 吕玉山|冯连东|关学锋|
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基于一种仿生表面Smart垫的化学机械抛光机理研究
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