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Material removal distribution of chemical mechanical polishing by the bionic polishing pad with phyl
  • 期刊名称：Solid State Phenomena
  • 时间：0
  • 页码：87-92
  • 语言：英文
  • 相关项目：基于一种仿生表面Smart垫的化学机械抛光机理研究
作者： Lu Yushan; Wang Jun;Li Nan; Zhang Tian; Duan Min; |
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基于一种仿生表面Smart垫的化学机械抛光机理研究
期刊论文 13 专利 4
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