中文摘要：

用溶胶-凝胶法制备（Pb0.55Sr0.5）TiO3（简称PST）前驱体溶液，以三水醋酸铅、醋酸锶、钛酸丁酯为原料，乙二醇甲醚、去离子水、乙酰丙酮做溶剂，通过旋涂工艺在Pt／Ti／SiO2／Si（100）基片上沉积PST薄膜。薄膜经320～380℃热分解，再经650℃退火30min，得到晶化好的薄膜样品，x射线衍射结果表明PST薄膜为钙钛矿立方相结构，其晶格常数为a=0．3919nm。用原子力显微镜观测其表面形貌，薄膜平均晶粒尺寸为300nm。用XPS测量了650℃退火PST薄膜样品的表面化学态，结果表明表面富铅，接近表面区域的原子比率Pb：Sr：Ti：O是0．52：0．50：1．0：3．02，接近（Pb0.5Sr0．5）TiO3的理想配比。

英文摘要：

Lead strontium titanate （Pb0.5 Sr0.5）TiO3 （abbreviated as PST） thin films were deposited on Pt/Ti/ SiO2/Si（100） substrates by using a sol-gel method with spin-coating processing. The crystalline films were studied by means of X-ray diffraction （XRD） and atom force microscopy （AFM）. The results show that the film was annealed at 650℃ for 30min with perovskite cubic phase, and the lattice parameter a= 0. 3919nm. The chemical states and chemical composition of the films were determined by X-ray photoelectron spectroscopy （XPS） near the surface. The results show that the extra lead oxides exist in film surfaces. The atomic ratio Pb ： Sr ： Ti ： O in the near-surface region is 0. 52： 0.50 ： 1.00 ： 3.02, which is closer to the stoichiometry of （Pb0.5Sr b0.5）TiO3.