声光可调谐滤波器(Acousto-Optic Tunable Filter,AOTF)是一种新型分光器件,近年来在光谱分析技术领域得到广泛应用。首先分析了AOTF的分光特性及驱动要求,介绍了AOTF器件的关键性能指标和测试方法。其次针对AOTF器件性能设计了专用测试系统。系统采用单色仪作为光源,通过多谱段集成检测方法,能对宽光谱AOTF器件进行驱动频率匹配、衍射效率和光谱分辨率的测试。测试系统波长的覆盖范围是400-3200 nm,光源稳定性优于98%,光谱分辨率在450 nm处小于0.4 nm,在2400 nm处小于2.0 nm。最后以短中波晶体的测试为例,验证了该测试系统的功能及性能,达到了设计要求。基于多谱段集成检测的宽光谱AOTF性能测试系统由于其高效、便捷等特点,具有很强的工程应用价值。
As a new type of spectroscopic devices, acousto-optic tunable filter(AOTF) has been widely used in spectral detection. Firstly, the dispersive principle and drive performance of AOTF were introduced, and some key performances of AOTF were discussed. Secondly, a set of analysis system for these performances was proposed. This system, with a monochromator as the light source, was based on multi-band acquisition, and was used to test the parameters of broad-spectral-range AOTF such as relation between driving frequency, diffraction efficiency and spectral resolution at different wavelength.The spectrum range covered from 400 nm to 3 200 nm. The intensity stability of light was better than98%. The spectral resolution was less than 0.4 nm at 450 nm, 2.0 nm at 2 400 nm. Taking short-to-middle wave infrared AOTF as an example, the function and performance of the analysis system were verified finally, and the result shows the system suffices requirement of the design, and because of the high efficiency and convenience, the system has a high value for engineering application.