中文摘要：

适应现代光电检测技术对微弱光电信号测量精度的进一步追求，提出并验证双光路互参考高精度AOTF衍射效率测试方法。该方法利用光路可切换器件实现光路互参考检测，从而达到降低光源不稳定性、探测器响应差异性及光电干扰的目的，有效提高测试精度。首先对双光路互参考高精度AOTF测试方法的原理进行具体阐述，然后说明建立的针对AOTF衍射效率测量的双光路互参考探测实验装置并对其进行实验验证。分析及试验结果表明：采用互参考技术可使衍射效率测量方法数据精确度平均提高50％，有效降低光源不稳定性、探测器响应差异性的影响，实现提高测试精度的目的，最后对方法的适用范围及参考意义进行了分析及讨论。

英文摘要：

To adapt to the further requirement of measurement accuracy of slight photo electric signal in the field of modem photoelectric detection technology, high-precision measurement method of diffraction efficiency of Acousto-Optic Tunable Filter （AOTF） was proposed and verified. Light path switchable devices was used to achieve cross-reference detection, reducing the effect of light source instability, nonuniform response of the detector and photoelectric-jamming, which improved the accuracy of measurement effectively. Firstly, the principle of high-precision measurement of diffraction efficiency of AOTF based on double-optical-path and cross-references was introduced concretely in this paper. Experiments were performed to testify the accuracy of this method. Experimental results indicate that the diffraction efficiency measurement accuracy is improved 50 percent averagely by using cross-references approach. The proposed method has a significance to reduce the influence of source instability and response difference in detectors, and improve high-precision measuring. Finally, the range of application and referential meaning of this method were also discussed and analyzed.