中文摘要：

采用溶胶-凝胶法在石英玻璃基片上制备出了Pr掺杂ZnO透明导电薄膜,研究了Pr掺杂对ZnO透明导电薄膜结构、形貌、光学和电学性能的影响。实验结果表明,Zn1-xPrxO薄膜均为纤锌矿结构,当Pr掺杂含量为1%时,Zn1-xPrxO薄膜的结晶质量最好、可见光平均透过率最高、电阻率最低,具有最佳的光电综合性能。

英文摘要：

Pr-doped ZnO transparent conducting thin films were deposited onto quartz substrates by sol-gel pro- cessing. The effect of Pr doping on structure, morphology, optical and electrical properties of ZnO thin films were in- vestigated. The results show that the crystal structure of Znl-xPrxO films was wurtzite structure. The sample pre- pared with Pr content of 1% possessed the highest optoelectrical performance, with the best crystalline quality, the lowest electrical resistivity, and the highest average visible transmittance.