中文摘要：

采用特定的＂单晶硅基片/Ba0.7Sr0.3TiO3层＂微透镜阵列内芯材料,研究其表面的介质上电润湿（EWOD）特性。Ba0.7Sr0.3TiO3是一种钙钛矿结构的铁电体,它具有高的介电常数和低的漏电流特性,其相对介电常数可高达180。通过溶胶——凝胶的方法在单晶硅基底上制备了Ba0.7Sr0.3TiO3薄膜,分析对比了不同Ba0.7Sr0.3TiO3薄膜厚度下的电润湿效应。实验结果表明,导电液滴接触角的余弦值随电压的增大而增大;在Ba0.7Sr0.3TiO3厚度不同的情况下Ba0.7Sr0.3TiO3层厚度与接触角余弦值变化率成反比。在绝缘介电层相同厚度情况下,Ba0.7Sr0.3TiO3绝缘介电层的性能要优于派瑞林、氮化硅、二氧化硅绝缘介电层的性能。相关结论验证了Ba0.7Sr0.3TiO3在微透镜阵列中的可行性以及其相对于其它绝缘材料的优越性。

英文摘要：

The properties of Electrowetting-on-dielectric （EWOD） on the core-surface of optofluidic lens-array with specific ＂single crystal silicon substrate/barium strontium titanate layer＂ material are one of the important research topics in optofluidics. Ba0.7Sr0.3TiO3 is a kind of Perovskite ferroelectrics. It possesses high dielectric constant and low leakage current. The dielectric constant of BST can reach up to 180. In this experiment, Ba0.TSr0.3TiO3 film was prepared with the method of sol-gel on the single crystal silicon. The EWOD effect under different Ba0.7Sr0.3TiO3 film thicknesses were analyzed and compared. The results showed that contact angle decreased as the voltage increased. The contact angle varied correspondingly when the thickness of the insulating layer changed. It was also observed that Ba0.7Sr0.3TiO3performed much better than Parylene, Silicon dioxide and Silicon Nitride. These conclusions verified the feasibility of Ba0.7Sr0.3TiO3 in EWOD and its superiority over other insulating materials.