中文摘要：

以硝酸铋和钛酸四丁酯为原料,以三氯十八烷基硅烷（OTS）为模板,采用自组装单层膜（self-as-sembled monolayers,SAMs）技术,在玻璃基板上成功制备了Bi2Ti2O7晶态薄膜。借助X射线衍射（XRD）、场发射扫描电子显微镜（FE-SEM）、X射线能谱（EDS）及原子力显微镜（AFM）等测试手段对Bi2Ti2O7薄膜进行了表征。结果表明,以OTS为模板利用自组装技术,经540℃煅烧2h可成功制得立方相Bi2Ti2O7晶态薄膜,且薄膜表面平整光滑,均匀致密。

英文摘要：

Bi2Ti2O7 thin film was prepared on the glass substrate by the self-assembled monolayer（SAM） tech-nique with Bi（NO3）3 and Ti（OC4H9）4 as the raw materials and octadecyltrichlorosilane as the template.The crystal phase composition,microstructure and topography of the Bi2Ti2O7 thin films were characterized by various techniques,including X-ray diffraction,field-emission scanning electron microscopy,energy disperse spectroscopy and atomic force microscopy.The results indicate the pure cubic phase Bi2Ti2O7 thin film is successfully prepared after annealing at 540℃ for 2h.The prepared Bi2Ti2O7 thin film has a flat,homogeneous and dense surface.