中文摘要：

设计了一种新型的柔性微位移放大机构，它利用杠杆原理进行放大，结构上通过将多层单元结构进行叠加形成层叠式的新型结构，其将普通平面柔性机构和立体柔性机构融为一体。其结构紧凑，无传动间隙，克服了平面式机构复杂、占地面积大以及立体柔性结构难以加工的缺陷。通过对平面柔性单元进行理论分析，得到影响其整体性能的输入输出特性方程。并通过有限元方法分析了其静态输出性能。然后将其组合成双层的叠式空间结构，分析了双层式结构存在的问题及其原因，并在层数上对其结构进行了改进以克服出现的问题。

英文摘要：

A new type of flexible micro-displacement amplification mechanism was presented,which adopts new type of stacked structure,uses leverage to amplify the micro-displacement integrating the ordi- nary planar flexible mechanism and three-dimensional flexible mechanism.The structure is compact,without transmission gap ,while overcoming the difficult process of three -dimensional flexible structure and the complex structure of the planar mechanisnuThrough theoretical analysis of single-layer structure ,the inputoutput characteristic equation of the overall performance is obtained.In addition the static output performance was analyzed by the finite element method.Then,the stacked spatial structure is proposed based on the single-layer structure ,the problems and their causes of double-layer structure are analyzed.At last,im- provement for the layer structure was done to overcome the problems ocurred.