中文摘要：

应用介观压阻效应,研究设计了一种含直拉直压微梁结构的微机械陀螺,并利用共振隧穿薄膜作为该微机械陀螺的敏感元件以提高陀螺的灵敏度。MATLAB软件仿真表明：当施加在GaAs/AlAss共振隧穿薄膜上的偏置电压为0.9 V,薄膜上的应变幅值不大于0.000 575时,薄膜都工作在负阻区域,此时共振隧穿薄膜能较好地检测出微梁上的应变。仿真结果还表明,在共振隧穿薄膜负阻区域的偏压为0.78 V时,压阻效应灵敏度的数量级为4.19×10-10,比室温下硅的最大压阻灵敏度高一个数量级,达到了高灵敏度微机械陀螺设计的目的.

英文摘要：

A high sensitivity micro-gyroscope based on meso-piezoresistanc was researched and designed in the paper.And the sensitivity of the micro-gyroscope is enhanced by using the resonant tunneling film as sensor.It is indicated by utilizing MATLAB software in the article that when the bias voltagee on the GaAs/AlAs resonant tunneling film is 0.9 V,and the strain amplitude of the resonant tunneling film is less than 0.000575,the resonant tunneling film work on the negative resistance region,the strain on the tiny beams is detected well.The simulations of MATLAB software is indicated too that when the bias voltagee on the GaAs/AlAs resonant tunneling film is 0.78 V,Order of magnitude of piezoresistive effect sensitivity is 4.19×10-10 and is higher one order of magnitude of than SI＇s in the room temperature.The target is obtained that designing high sensitivity of the micro-gyroscope.