中文摘要：

针对研制时栅位移传感器过程中的误差标定环节,常规光栅传感器精度不满足要求的问题,采用激光干涉仪作为误差标定基准,自主研制了基于激光干涉仪的直驱式时栅角位移传感器误差自动标定与修正系统。利用时栅角位移传感器的多测头结构与误差曲线等间距周期性分布的特性,以一个对极的误差曲线重构传感器整周的误差曲线,采用多项式拟合算法构建了时栅角位移传感器的误差修正模型。实验结果表明,误差自动标定与修正系统可以快速、准确地对时栅角位移传感器进行自动误差标定与修正,修正后的时栅角位移传感器的整周误差达到±0.43″。

英文摘要：

Since the conventional grating sensor accuracy does not meets the requirement for error calibration and correction in the process of developing the time grating angular displacement sensor,an automatic error calibration and correction system for the time grating angular displacement sensor is developed by using the laser interferometer as the standard measurement instrument.According to the structure of multiple probes and the characteristic of equal interval periodic distribution of the error curve for time grating angular displacement sensor,the error curve in one polar for time grating angular displacement sensor is used to restructure the circumference error curve.The error correction model is established based on a polynomial fitting algorithm.Experimental results show that the error of time grating angular displacement sensor can be quickly and accurately calibrated and corrected by using the automatic error calibration and correction system,and the measurement error can reach to ± 0.43″within 0 ~ 360°.