中文摘要：

为提高太赫兹（THz）微测辐射热计的探测灵敏度，优化设计探测单元的徽桥结构：增加10nm的镍铬（NiCr）金属薄膜用作THz辐射吸收层并增大探测单元面积．采用IntelliSuite软件建立不同单元尺寸、不同桥腿宽度的徽桥结构的有限元分析模型，进行力学与热学仿真．力学仿真表明，增大探测单元面积，形变明显增加；增大桥腿宽度可以小幅改善形变．热学仿真表明，通过增大探测单元面积或减小桥腿宽度可以提升桥面温升．制备出基于不同探测单元结构的THz徽测辐射热计焦平面阵列，探测单元的实际形变情况与仿真结果基本相符．单元面积75m×75μm，桥腿宽度1.3μm的徽桥结构具有较好的力学与热学性能，适合用作THz徽测辐射热计的探测单元结构．

英文摘要：

The authors made optimal design on micro-bridge structure of uncooled microbolometer operated in terahertz （THz） range to improve detection sensitivity. A nickel-chromium （NiCr） thin film with a thickness of 10 nm acting as THz absorption layer was added and the absorption area of the cell was expanded. IntelliSuite was used for mechanical and thermal simulations by finite element analysis of micro-bridge structures with different unit sizes and different bridge leg widths. Results revealed that deformation was significantly increased with the increased cell area. A small range decrease of deformation was achieved by using wider legs. Temperature rise of bridge was enhanced by increasing the cell area and reducing the width of bridge legs. THz microbolometer focal plane arrays based on the designed structures were manufactured and the results agreed well with the simulations. The structure with a unit size of 75 gmx75 μm and a leg width of 1.3 μm was suitable for THz microbolometer for its good mechanical and thermal properties.