综述了近年来钛酸盐薄膜的软化学制备技术领域的一些研究进展,重点介绍了几种典型的方法及其特点:溶胶-凝胶法、聚合物前驱体法、化学溶液沉积法、液相沉积法和仿生法,展望了钛酸盐薄膜软化学制备技术的进一步发展趋势。
In this paper, the soft chemistry preparing techniques and their recent developments are summatied. Several typical soft chemistry processes such as sol-gel, polymeric precursor method, chemical solution deposition, liquid phase deposition,bio-lnspired method and their characteristics in the preparation of titanate thin films are introduced emphatically,and the future development tendency of soft chemistry preparing techniques for titanate thin films is prospected.