采用水热合成法直接在高纯钛金属薄片上制备了BaTiO3薄膜;研究了水热反应温度对制备BaTiO3薄膜的影响;利用X-射线衍射(XRD)、扫描电子显微镜(SEM)和X-射线光电子能谱(XPS)对制备的薄膜进行分析表征。研究结果表明,当水热反应温度相对较低(低于200℃)时,得不到纯净的四方钙钛矿BaTiO3薄膜;在250℃下水热反应5h,得到了纯净的四方钙钛矿BaTiO3薄膜,薄膜的晶粒呈球形,平均粒径为φ200-300nm。
BaTiO3 thin films were prepared directly on titanium metal substrates by hydrothermal synthesis method. The influences of hydrothermal temperature on the as-grown BaTiO3 thin films were studied and the asgrown thin films were analyzed by using XRD, SEM and XPS techniques. The results of the research reveal that pure tetragonal BaTiO3 thin films could not be obtained when the hydrothermal temperature is lower than 200 ℃ ; whereas the pure tetragonal BaTiO3 thin films can be obtained through hydrothermal reaction at 250 ℃ for 5 hours, and the grain is spherical with the mean grain size being about φ200-300 nm.