中文摘要：

随着微纳技术、生物医学、航空航天等领域的发展,微小力值的计量得到了越来越广泛的应用。针对无源悬臂梁力值传感器的使用需求,研究了影响悬臂梁弹性系数的因素,设计了一组弹性系数为0.041-21.125N/m的无源悬臂梁力值传感器件,采用基于绝缘体上硅（SOI）硅片微机电系统（MEMS）工艺对器件进行制备,实验结果表明,制备的器件尺寸精度达到0.2%,器件的均匀性和成品率均可控。

英文摘要：

Micro force metrology has been widely used with the development of micro/nano technology, biomedi- cine, aerospace and other fields. The cantilevers with the spring constant ranged from 0. 041 - 21. 125 N/m have been designed for the demand. By utilizing optimal combinations of microfabrication processing techniques, the can- tilevers were created from SOI wafers. The processing results indicate that the products have the size accuracy of 0.2%and the uniformity and stability are controllable.