中文摘要：

利用非平衡磁控溅射法制得厚度达到2.23μm的掺铬含氢类金刚石（Cr-DLC）碳膜。采用Raman光谱和XPS对制得的薄膜进行了结构和热稳定性等表征。结果表明：室温时,薄膜在1 544cm~（-1）附近的Raman＂G＂峰归属于石墨结构中C—C键的伸缩振动,即E2g模式;而1 367cm-1附近的＂D＂峰归属于sp~2碳环的＂呼吸＂振动模式,即A1g模式;计算得到薄膜sp3键的相对含量约为48at.%。加热至300℃,薄膜的Raman谱图与室温时相似,表明此温度段薄膜的结构稳定,未发生明显改变;至400℃时,ID/IG值迅速增大,sp~2键含量升高,表明此时DLC膜发生了明显的结构变化,开始发生石墨化。继续升温,膜中ID/IG比率增加,＂G＂峰位向高波数方向位移,表明sp~2/sp~3比率逐渐增大,薄膜石墨化程度加强,sp~2键的无序度逐渐降低,最终导致薄膜的摩擦系数和磨损率等逐渐增大,热稳定性逐渐降低。退火600℃时,ID/IG值以及sp~2键含量达到最大值,DLC薄膜失效。

英文摘要：

Chromium doped amorphous hydrogenated carbon a-C∶H（Cr）films（2.23μm in thickness）have been successfully prepared with unbalanced magnetron sputtering technology（UBMS）in this paper.Raman spectrum and X-ray photoelectron spectroscopy（XPS）have been used to study the structure and thermal stability of the Chromium doped diamond-like carbon films（Cr-DLC）.The results indicate that,at the room temperature,the Raman absorption peak ＂G＂near 1 580cm~（-1） was assigned to C—C stretching vibration mode（E2g）in the Cr-DLC films,while the peak ＂D＂near 1 350cm~（-1） was assigned to sp~2 breathing vibration mode（A1g）.The relative concentration of sp~3 bond in the film is at 48%.When heated till 300 ℃,the Raman pattern of sample is similar to that of the sample at room temperature,indicating the structure of Cr-DLC film is stable.At 400 ℃,the ratio of ID/IGand the concentration of sp~2 bond clearly increase,indicating the change of the structure in the CrDLC and the appearance of graphitization.With temperature going up,the rise of ID/IGratio and the shift of the peak ＂G＂to high wavenumber show that the rise of sp~2/sp~3 ratio,the intensity of graphitization,and the decline of the disorder of sp~2 in the Cr-DLC films lead to the increase of the friction coefficient and wearing rate and the decline of the Cr-DLC thermal stability.When the it is up to 600℃,the ratio of ID/IGand the concentration of sp~2 bond reach the max value while the Cr-DLC film loses its efficacy.