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Optimizing hydrogen plasma etching process of preferred (110)-textured diamond film
  • ISSN号：0257-8972
  • 期刊名称：Surface and Coatings Technology
  • 时间：2013.8.15
  • 页码：S379-S381
  • 相关项目：硼(10B)/金刚石薄膜复合结构的制备及中子阵列探测技术研究
作者： Tang, Ke|Min, Jiahua|Shi, Weimin|Xia, Yiben|
同期刊论文项目
硼(10B)/金刚石薄膜复合结构的制备及中子阵列探测技术研究
期刊论文 23 会议论文 2
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