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Deposition and properties of Al-containing diamond-like carbon films by a hybrid ion beam sources
  • ISSN号：0925-8388
  • 期刊名称：Journal of Alloys and Compounds
  • 时间：2011.3.3
  • 页码：4626-4631
  • 相关项目：金属掺杂类金刚石薄膜的微结构与应力演变机制研究
作者： Dai, Wei|Wang, Aiying|
同期刊论文项目
金属掺杂类金刚石薄膜的微结构与应力演变机制研究
期刊论文 10 专利 2
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