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Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybri
ISSN号:0042-207X
期刊名称:Vacuum
时间:2011.2.2
页码:792-797
相关项目:金属掺杂类金刚石薄膜的微结构与应力演变机制研究
作者:
Dai, Wei|Ke, Peiling|Wang, Aiying|
同期刊论文项目
金属掺杂类金刚石薄膜的微结构与应力演变机制研究
期刊论文 10
专利 2
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