中文摘要：

铌酸钾钠无铅压电陶瓷薄膜具有居里温度高、机电耦合系数高、介电常数低等优点，制备方法种类繁多。综述了铌酸钾钠薄膜的制备技术，包括溶胶一凝胶法、脉冲激光沉积法和磁控溅射法等；讨论了铌酸钾钠薄膜各种方法的制备工艺与功能性质的关系等，指出了各种制备技术的优缺点及发展现状；最后提出了目前铌酸钾钠薄膜制备及应用中存在的一些问题及今后的发展方向。

英文摘要：

Potassium sodium niohate （KNN） lead-free piezoelectric ceramic thin films possess high Curie temperature, electromechanical coupling coefficient and low dielectric constant, and moreover have a large variety of preparation methods. The current growth techniques for KNN films including sol-gel, pulsed laser deposition and reactive magnetron sputtering have been reviewed briefly. The recent progress, the merits and demerits of those methods are discussed,the controlling conditions of these fabrication methods and the as-synthesized film＇s properties are summarized at the same time. At last, the problems still exist in the preparations and applications together with the prospect for KNN films are indicated.