以自制氢氧化铌、化学试剂碳酸钾、碳酸钠为原料,柠檬酸(CA)为螯合剂,乙二醇(EG)为酯化剂,采用水热辅助聚合物前驱体法在SiO2/Si基板上制备了铌酸钾钠(KNN)薄膜。研究了CA和EG用量对溶胶性能的影响,衬底和退火温度对薄膜的影响。结果表明,当n(CA):n(金属离子)=3:1,n(CA):n(EG)=1:2时,可获得稳定性好的溶胶。以水热处理过的Si片为基板得到的薄膜结晶性和致密性都有了很大的改善;随着退火温度的升高,薄膜的结晶性越来越好,所得薄膜粒径均匀,无裂纹,有定向生长的趋势。
The self-prepared niobium hydroxide,sodium carbonate,and potassium carbonate were used as raw material,citric acid (CA) and ethylene glycol (EG) were used as chelating agent and esterification agent separately.Potassium sodium niobate (KNN) thin films on SiO2/Si substrates were prepared by the hydrothermal-assisted polymeric precursor method.The effects of the amount of CA and EG on the stability of the precursor Sol were investigated and the effects of Si slice and the annealed temperature on thin films were discussed.It was found that a homogeneous precursor Sol could be formed at the case of n (CA):n (metal ion) =3:1,n (CA):n (EG) =1:2.The crystallization and compact properties had been improved greatly when the Si slice was treated by hydrothermal method.With annealed temperature addition,the crystallization properties of thin films become better.The prepared thin films were uniformed in grain size,crack-free and grew directionally.