中文摘要：

利用超声喷雾热解方法，以不同的沉积温度（450～510℃）在石英衬底上制备出具备较高光学质量的氮掺氧化锌（ZnO：N）薄膜。通过X射线衍射（XRD）谱研究了薄膜的结构，用扫描电子显微镜（SEM）研究了薄膜的表面形貌，用紫外可见（uV）分光光度计、光致发光（PL）谱对薄膜的光学特性进行了测试分析。结果表明，所制备薄膜在可见波段具有较高透过率，并且沉积温度对ZnO：N薄膜的透过性能有很大影响。在衬底温度为500℃时得到的ZnO：N薄膜为六角纤锌矿结构，结晶质量最好、光透过率最高。PL谱的测试结果显示，在该条件制备的ZnO：N薄膜只在389．4nm处有一个较强的近带边紫外发光峰。

英文摘要：

ZnO：N thin films with better optical properties were successfully prepared on quartz substrate by ultrasonic spray pyrolysis method at different substrate temperatures （450-5i0 ℃ ）. Structural, mor- phological and optical properties of ZnO： N thin films were investigated by X-ray diffraction （XRD）, scanning electron microscopy （SEM）, UV-VIS spectrophotometer and photoluminescence （PL）. Experi- mental results show that all the deposited films have good transmittance, and the substrate temperature has important effect on them. The ZnO：N thin films deposited at 500℃ are hexagonal wurtzite struc- ture with better crystalline quality and higher transmittance. Only the high-intensity near-hand edge ul- traviolet emission peak （389.4 nm） is observed in room-temperature photoluminescence spectra for this sample.